The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 1988
Filed:
Dec. 01, 1987
Applicant:
Inventors:
Kimihiro Nakamura, Kanagawa, JP;
Toshiyuki Takano, Kanagawa, JP;
Assignee:
Fuji Electric Co., Ltd., Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01G / ; G01L / ;
U.S. Cl.
CPC ...
361283 ; 73724 ;
Abstract
An electrostatic capacitive pressure sensor having two silicon diaphragms electrostatically bonded to opposite faces of an insulating member to form two measuring chambers. A silicon base is coupled to the first diaphragm to form a pressure chamber. The insulating member is provided with a through-hole electrode. The electrode and the two silicon diaphragms are operative to measure pressure in the pressure chamber by measuring changes in capacity in the measuring chambers.