The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 1988

Filed:

Apr. 23, 1987
Applicant:
Inventors:

Ueda Shinjiro, Abiko, JP;

Osami Matsushita, Tomobe, JP;

Naoyuki Tamura, Kudamatsu, JP;

Yoshiteru Miyatake, Hitachi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01D / ;
U.S. Cl.
CPC ...
415 90 ; 4151 / ; 310 905 ; 384446 ;
Abstract

A turbomolecular vacuum pump having stator blades disposed in a multistage fashion within a casing in an axial direction thereof, and rotor blades which are located between respectively adjacent stator blades and are mounted on an outer periphery of a rotor situated centrally of the casing. A motor rotor is fixed to a rotating member which is formed of the rotor having the rotor blades fixed to the outer periphery, and a motor stator opposite to the motor rotor is arranged so as to construct a drive mechanism for the rotating member. The rotating member is supported at a lower portion thereof by a pivot-type plane bearing, and a magnetic bearing is arranged in such a manner so as to oppose a lower end of the rotor and a supporting member for the rotating member.


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