The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 1988
Filed:
Aug. 25, 1986
Applicant:
Inventor:
Yoshihiko Kudo, Tokyo, JP;
Assignee:
Nippon Kogaku K. K., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2502 / ; 250548 ;
Abstract
A projection type exposure apparatus for projecting an original pattern formed on a mask onto a substrate, which comprises a projection optical system, a lens tube member for holding the projection optical system, an alignment optical system and a battle wall member disposed along the path of the projection light beam in the space between the mask and the projection optical system for shutting the space from the flow of external air.