The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 1988
Filed:
Feb. 25, 1987
Arun Madan, Golden, CO (US);
Bolko Von Roedern, Wheat Ridge, CO (US);
Glasstech Solar, Inc., Perrysburg, OH (US);
Abstract
An apparatus for depositing thin films on a substrate includes at least one deposition module, a load lock module, a gate valve and a transportation mechanism for moving a substrate between the load lock and the at least one deposition module, the transportation mechanism being adapted to operate within ultra high vacuum conditions. The at least one deposition module is capable of maintaining an ultra high vacuum for depositing materials from reactive gases contained therein on a substrate. The load lock module is connected to the at least one deposition module by a gate valve and is capable of maintaining an ultra high vacuum. The transportation mechanism for moving the substrate between the load lock and the at least one deposition module is adapted to operate under ultra high vacuum conditions so that the substrate can be drawn from the load lock into the deposition module without breaking vacuum in the deposition module and contaminating the reactive gases contained therein. The apparatus is especially useful for manufacturing solar cells formed from doped amorphous silicon deposited from a glow discharge.