The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 1988
Filed:
Jul. 17, 1986
Donald A Olsen, Millis, MA (US);
Helix Technology Corporation, Waltham, MA (US);
Abstract
The refrigerator of a cryopump is positioned within an insulating vacuum and the two stages of the refrigerator are selectively thermally coupled to first and second stage cryopanels. After initial rough pumping by an air ejector, rough pumping is completed during startup by coupling the cold first stage of the refrigerator to a first stage adsorption cryopanel. The second stage of the refrigerator is thereafter coupled to the second stage cryopanel. Thermal coupling of the refrigerator to the cryopanels is by means of spring biased thermal contacts brought into position by movement of the refrigerator. The thermal contact elements are provided with sufficiently large thermal masses to handle the large thermal loads of system startup.