The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 1988

Filed:

Jan. 28, 1987
Applicant:
Inventors:

Jean-Marie Caussignac, Le Perreux Sur Marne, FR;

Gerard Morel, Courbevoie, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356371 ; 356376 ;
Abstract

A method of rapidly determining surface relief of an object or a structure without making contact therewith based on quantifying the degree to which the image of an illuminated point or small spot on the surface is defocussed. Said point or spot is illuminated by a source of electromagnetic radiation such as a laser, and the relief is determined in the form of a profile where the height of any point on the profile is represented by the ratio of the energy values of two beams derived by splitting a single beam reflected from the surface under investigation: one of the beams acting as a reference and the other of the beams being limited by the action of a diaphragm and constituting a measurement beam.


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