The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 1988
Filed:
Apr. 10, 1986
Applicant:
Inventor:
Giorgio Grego, Venaria, IT;
Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356349 ; 356351 ; 356357 ;
Abstract
A static interferometric ellipsometer, wherein a source (3) generates a coherent light-beam with two monochromatic radiations at slightly different frequencies. A first photodetector (6) generates a first beat between the two radiations, to be used as reference. A second photodetector (9) generates a second beat between the two radiations, after they have been polarized in perpendicular planes and separated so that one of them is reflected onto the photodetector (9) by the sample under test (1,2). A measuring and computing system (11) determines the optical properties of said sample starting from the intensity of the second beat and from the relative phase between the two beats.