The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 1988
Filed:
Nov. 18, 1986
Applicant:
Inventors:
Takatoshi Chiba, Muko, JP;
Hideyuki Teraoka, Kyoto, JP;
Assignee:
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219497 ; 219505 ; 219494 ; 219358 ; 340588 ; 307117 ;
Abstract
A temperature control signal (S.sub.1) responsive to a target temperature is biquadrated (S.sub.1.sup.4) to produce a power control signal. A power supply unit supplies electric power to one or more radiant heat sources on the basis of the power control signal, whereby an object such as, for example, a wafer is heated by radiant energy from the one or more radiant heat sources. The wafer temperature is proportional to the biquadrative root of the radiant energy in accordance with the well-known Stefan-Boltzmann's law, whereby the wafer temperature correctly follows a predetermined time-dependent target temperature variation over time.