The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 1988
Filed:
Feb. 24, 1986
Rozalie Schachter, Flushing, NY (US);
Marcello Viscogliosi, North Tarrytown, NY (US);
Stauffer Chemical Company, Westport, CT (US);
Abstract
Accurate metered amounts of Pnictide.sub.4 species are delivered via an argon carrier gas into an evacuated sputtering deposition chamber. The pnictide is maintained at a high temperature in a tall column by means of a constant temperature oil bath. An inert gas, such as argon, is passed through the column of Pnictide and the Pnictide.sub.4 enriched carrier gas delivered to the vacuum chamber. Films of pnictide, polypnictide, and other pnictide compounds may be deposited for semiconductor, thin film transistors, and other applications including insulation and passivation, particularly on III-V semiconductors. The local order of the deposited films may be controlled by varying the amount of energy delivered to the surface of the substrate, which is a function of its temperature, the RF power used, and the amount of excess P.sub.4 supplied. The pnictides used in the invention may include phosphorus, arsenic and antimony. Phosphorous and KP.sub.15, and KP.sub.x wherein x ranges from 15 to infinity are discussed. Deposition onto III-V semiconductors (InP, GaP, and GaAs) are disclosed.