The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 1988
Filed:
Dec. 08, 1986
Applicant:
Inventor:
Peter J Schubert, Kokomo, IN (US);
Assignee:
Delco Electronics Corporation, Kokomo, IN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 69 ; 437 73 ; 437 89 ; 437238 ;
Abstract
A method of fabricating a self-aligned hole-within-a-hole structure which resolves the smaller hole at small dimensions by using a single photolithography step to define the two holes, the step being performed on a planar surface. The method comprises fabricating a block on a substrate having the dimension of the smaller hole, fabricating a sidewall spacer on the block such that the spacer and the block have the dimension of the larger hole, growing a first layer surrounding the sidewall spacer, removing the sidewall spacer, growing a second layer surrounding the block which is thinner than the first layer, and removing the block.