The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 1988

Filed:

Sep. 29, 1987
Applicant:
Inventor:

David A Clarke, Eastleigh, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ; G01L / ;
U.S. Cl.
CPC ...
73723 ; 73729 ; 73754 ; 200 814 ; 200 816 ; 200 / ;
Abstract

A semiconductor integrated pressure transducer in which a semiconductor substrate incorporates a hermetically sealed system comprising a first chamber communicating with a second chamber via a capillary. The first chamber contains a fluid and has at least one portion of a wall in the form of a deformable membrane separating the atmosphere within the chamber from that external to the sensor. The second chamber contains a compressible gas and has rigid walls. The capillary is partially filled with electrically conducting liquid, and the liquid physically separates the fluid in the first chamber from the gas in the second chamber. The wall of the capillary is electrically conductive at least in two separated regions such that in use, at a predetermined external atmosphere pressure, the electrically conductive liquid makes contact with both electrically conductive regions thereby completing an electrical circuit.


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