The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1988
Filed:
Jan. 21, 1986
Applicant:
Inventors:
Albert L Armstrong, Latham, NY (US);
William Moroney, Wenham, MA (US);
Assignee:
M/A-COM, Inc., Burlington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01P / ; H01P / ; H01P / ;
U.S. Cl.
CPC ...
333250 ; 333 / ; 333252 ; 333260 ; 174 / ;
Abstract
A method of making a microwave semiconductor component and concurrently forming therewith a mounting membrane adapted for positioning the semiconductor component in an RF transmission medium such as a waveguide. Substantially concurrently with the deposition of a metallic film in connection with forming a semiconductor elements, there is deposited a metallic membrane on the base silicon substrate and outside of the circuit element. The outer periphery of the base substrate is removed to expose the membrane. The metallic membrane is preferably of gold.