The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1988
Filed:
Mar. 25, 1986
Applicant:
Inventors:
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
2191 / ; 2191 / ; 2191 / ;
Abstract
An annealing method for heating a sample by applying radiation of light beams thereto, arranged so that the radiant power of the light beams is sampled or monitored by a light detector (a light detector 12, for example, formed of a phototransistor, photodiode, and the like) and the radiant power of the light beams is controlled through a feedback with the data derived from the monitoring used as the feedback control signal so that the heating temperature of the sample is stabilized. The annealing can be performed with excellent reproducibility from sample to sample.