The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1988
Filed:
Jan. 28, 1985
Applicant:
Inventors:
John E Madocks, Piedmont, CA (US);
Alex Boozenny, Walnut Creek, CA (US);
Assignee:
The BOC Group, Inc., Montvale, NJ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
251158 ; 251 56 ; 251298 ; 251193 ;
Abstract
A gate valve for sealing an opening in the wall of a vacuum processing chamber is disclosed. The valve includes a gate having a pair of wheels mounted on opposite ends of the gate and a curved track aligned and shaped to guide the wheels through an angle so that the plane of the gate is rotated out of the path of substrates as the gate moves between its sealing and open positions. The curvature of the track should be sufficient to rotate the gate through an angle of at least 60.degree., and preferably 75.degree. to 105.degree., in order to minimize the dimension of the chamber normal to the direction of substrate travel.