The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 1988
Filed:
Mar. 21, 1986
Applicant:
Inventor:
Hans D Brust, Dudweiler, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 250307 ;
Abstract
During line-by-line scanning of a specimen surface by a primary beam of a scanning microscope, a predetermined specimen region is emphasized by comparing deflection voltages of a deflection means of the primary beam to variable comparison voltages and thereby generating a control signal which indicates whether a scanned point on the specimen surface lies within a predetermined region. The control signal is used to vary one or more scan parameters, such as the scan rate, the bandwidth of an evaluation circuit, or the intensity of the primary scan beam. An alternate embodiment includes an analog function network to generate the control signal.