The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 1988

Filed:

Dec. 12, 1986
Applicant:
Inventor:

Lewis M Fraas, El Sobrante, CA (US);

Assignee:

Daido Sanso K.K., Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219553 ; 219347 ; 219354 ;
Abstract

A heater apparatus particularly suitable for use in a vacuum deposition apparatus is disclosed. The heater apparatus contains an open structure surrounding the heating element to permit quick evacuation of the apparatus and avoid memory problems attendant with sealed heater tubes used in a high vacuum environment which is repeatedly cycled from vacuum to ambient pressure.


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