The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 1988
Filed:
Mar. 04, 1987
Applicant:
Inventors:
Thomas J Gmitter, Lakewood, NJ (US);
Claude J Sandroff, Tinton Falls, NJ (US);
Eli Yablonovitch, Scotch Plains, NJ (US);
Assignee:
Bell Communications Research, Inc., Livingston, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; B05D / ; B32B / ;
U.S. Cl.
CPC ...
437225 ; 4273722 ; 4274301 ; 4274432 ; 428688 ; 428698 ; 428699 ; 437235 ;
Abstract
A method of passivating the surface of a gallium arsenide substrate by cleaning the gallium arsenide substrate in an etching solution and depositing a sulfide film on the substrate. The step of depositing the sulfide film is preferably performed by spin-on of a sodium sulfide solution, followed by drying or annealing. The resulting passivated surface exhibits superior surface recombination velocity characteristics compared to prior art passivation techniques, thereby making possible superior solid state device operating characteristics.