The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 1988
Filed:
Nov. 26, 1984
Caroline M Gee, Woodland Hills, CA (US);
Hugh L Garvin, Malibu, CA (US);
Hughes Aircraft Company, Los Angeles, CA (US);
Abstract
The present invention provides a method of preparing the surface of a lithium niobate substrate (10) having titanium optical waveguides (12) for a subsequent deposition of a coating material such as electrodes. This cleaning or etching step prior to the deposit of desired coating materials is accomplished without deterioration of the transmission capacities of the optical waveguides (12). The substrate cleaning step of the present invention comprises the introduction of a predetermined amount of oxygen (16) at a controlled rate to provide a predetermined atmospheric environment surrounding the lithium niobate substrate (10). The subsequent etching of the substrate surface to a predetermined depth, for example, by argon ion bombardment, provides minimal damage to the optical waveguides while still producing an excellently cleaned surface preparatory for receiving subsequent layer depositions such as the electrodes.