The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1988
Filed:
May. 28, 1986
Applicant:
Inventors:
Tamio Hara, Niiza, JP;
Manabu Hamagaki, Wako, JP;
Yoshinobu Aoyagi, Saitama, JP;
Susumu Namba, Tokyo, JP;
Assignee:
Rikagaku Kenkyusho, Saitama, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; H05B / ;
U.S. Cl.
CPC ...
31511181 ; 2504 / ; 31323131 ; 3133621 ; 31511191 ; 31511131 ; 31511141 ;
Abstract
An electron beam-excited ion beam source having a plasma region, an accelerating cathode, an electron beam accelerating region, an accelerating anode, an ion producing region and a target cathode in this order, and further comprising means for applying a negative electric potential to the target cathode as against the accelerating cathode and an ion extracting electrode for extracting positive ions or negative ions produced in the ion producing region whereby a high current ion beam can be obtained in a low input power.