The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1988
Filed:
Feb. 11, 1987
Abstract
A superprecision positioning device includes an output shaft rotor, a plurality of eccentric shaft rotors including an inner eccentric shaft rotor and an outer eccentric shaft rotor, and a bearing base cylinder, electrically rotating and driving mechanism portions being provided between the eccentric shaft rotor and the output shaft rotor, and between the outer eccentric shaft rotor and the bearing base cylinder, respectively, whereby the eccentric shaft rotors and the output shaft rotor may be independently rotated and controlled. With this arrangement, movement in three degrees of freedom may be achieved by translational movement and rotation of the output shaft in a two-dimensional surface, and if an axially movable support shaft is inserted in the output shaft, an article being positioned may be moved with four degrees of freedom in total, providing superprecision positioning in units of 1/10 micron.