The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1988
Filed:
Sep. 02, 1986
Applicant:
Inventors:
Peter L Tremont, Spring, TX (US);
Arthur J Ackermann, Kirkwood, MO (US);
Assignees:
Monsanto Company, St. Louis, MO (US);
Arrowhead Industrial Water, Inc., Lincolnshire, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430314 ; 430316 ; 430317 ; 430325 ; 430326 ; 430394 ; 437946 ;
Abstract
A process is disclosed for manufacturing an integrated circuit in which multiple patterned layers of thin film materials are provided on a silicon wafer. The wafer is conditioned between the providing of layers, after each etching step, by rinsing the item with a purified water solution containing at least 0.01 ppm ozone, preferably between 0.02 and 0.09 ppm ozone.