The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1988
Filed:
Jan. 31, 1986
Applicant:
Inventor:
Urs Wegmann, Oberschan, CH;
Assignee:
Balzers Aktiengesellschaft, Liechtenstein, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118723 ; 118727 ; 118 50 ;
Abstract
A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.