The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1988
Filed:
Oct. 20, 1986
Bernard Latorre, Vincennes, FR;
Manuel Montero, Le Perreux, FR;
U.S. Philips Corporation, New York, NY (US);
Abstract
The invention relates to a crucible for growing epitaxial layers having a chemical composition formed by several chemical elements, of which at least one is volatile, by the method of epitaxy from the liquid phase, comprising an elongated support (72) on which a movable part (73) slides longitudinally, with the elongated support comprising at least one recess for accommodating a substrate (76) on which at least one epitaxial layer is to be deposited. The movable part (73) comprises at least one cavity (77) receiving a mother source (79) formed by initial material for epitaxy with the cavity having on the surface adjoining the elongated support a lower opening whose dimensions correspond to the dimensions of the substrates (76) present therein. At least one receptacle (80) accommodates a source for each volatile element of the chemical composition. It is characterized in that at least one of the cavities (77) of the movable part (73), for which a substrate (76) is present below the lower opening, has at least one upper opening formed solely by a calibrated conduit ( 78) connected to the receptacle (80) accommodating a source of each volatile element. Each calibrated conduit (78) controls the supply of the element to the mother source by the surface of the mother source which is not in contact with the epitaxial layer. The calibrated conduit (78) maintains a substantially constant composition for the mother source.