The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 1988
Filed:
Jul. 09, 1986
Applicant:
Inventors:
Assignee:
Balzers Aktiengesellschaft, , LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041921 ;
Abstract
Cathode disintegration targets which during sputtering are exposed to a very high thermal load have heretofore been pressed against a cooling support from the side to be sputtered by means of bars and screws, to cool them. According to invention it is proposed to make the target plate in several parts and to provide on the sides where the individual parts abut mutually correlated cutouts, pairs of which form a cavity into which an auxiliary element, preferably a plate with threaded bores, can be inserted for attachment from the cooling support side.