Triaxial tactile sensor

Abstract

The sensitive high resolution microminiature tactile sensor comprises an array of unique micromachined bossed silicon transducer cells in conjunction with requisite electrical circuitry and components, which collectively provide an ability to sense torque by detecting both normal and lateral applied loads, thereby opening a new frontier in tactile sensing. One preferred embodiment comprises a four column by four row array arrangement providing sixteen unique bossed closely spaced silicon diaphragm tactile transducer elements or sensors fabricated from a silicon body member. Collectively the close spacing between the microminiature tactile sensing elements approaches the resolution of the human hand. Electrical signal information from sensor-incorporated internal and external related circuitry components can be analyzed via computer devices to yield specific loading characteristics on the sensor surface. The upper surface of the transducer cell array is protectively covered with a thin polymer layer. The related circuitry may be fabricated by various known processes including diffused piezoresistive areas and deposited thin film conducting strips and tap-off points. These areas and related conductive circuitry for each of the microsmall sensor elements are configurable as two Wheatstone bridges which thereby help provide for the measurement of both normal and lateral load component magnitudes.