The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 1988
Filed:
Dec. 13, 1985
Muneki Hamashima, Tokyo, JP;
Kinya Kato, Tokyo, JP;
Nippon Kogaku K.K., Tokyo, JP;
Abstract
A pattern position detecting apparatus using a laser beam which is used for the recognition of an edge position, line width, etc., of a circuit pattern on a semiconductor wafer used in the fabrication of semiconductor devices. The apparatus includes an optical system for condensing a short-wave energy beam into a tiny spot and projecting it onto a sample, means for moving the sample and the spot relative to each other, first detecting means for receiving at least one of a reflection from a pattern and a scattering from a pattern edge, second detecting means for detecting a luminescence emitted from a pattern portion hit by the spot, and means for determining the position of the pattern in accordance with the detection information from the first and second detecting means and the scanning information of the spot.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile