The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 1988
Filed:
Jul. 11, 1986
James A Schwarz, Fayetteville, NY (US);
Syracuse University, Syracuse, NY (US);
Abstract
The reliability and life cycle of a thin-film conductor is predicted accurately and directly by measuring changes in its resistivity during an interval in which its temperature is dynamically increased. A semiconductor wafer containing a number of integrated circuits, each of which contains the thin-film conductor, is placed on a test platform of a semiconductor test station, where probes are positioned to supply a constant current stress to the conductor and to measure the voltage across it. A ramp current is supplied to a resistive heating element on the test platform to effect a linear rise in temperature over a span of time to the thin-film conductor. Changes in the conductor resistivity with respect to temperature provide kinetic data related to electromigration damage in the conductor, and hence to reliability over time.