The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 1988
Filed:
Oct. 15, 1986
Applicant:
Inventor:
Wolfgang Knauer, Malibu, CA (US);
Assignee:
Hughes Aircraft Company, Los Angeles, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250281 ; 250282 ;
Abstract
An apparatus for producing a beam of ionized clusters, having a cluster source and an ionizer, includes an electrostatic mass separator which permits only those clusters having a mass greater than a selected value to pass. Unclustered ions and clusters of smaller size are reflected and do not reach the substrate target. The mass separator has a retarding field electrode and an entrance electrode, both in the form of grids with the grid openings aligned. Use of a second electrostatic mass separator allows selection of a narrow range of cluster masses for acceleration against the substrate.