The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 1988

Filed:

Apr. 22, 1986
Applicant:
Inventor:

Peter R Bossard, Langhorne, PA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B03C / ; B03C / ;
U.S. Cl.
CPC ...
55126 ; 55132 ; 55131 ; 55155 ;
Abstract

An improved electrostatic filter particularly for use in high performance clean rooms for the semiconductor industry is achieved by forming a layer of wires in a 'plane' having corrugations along an axis perpendicular to the axes of the wires. The 'plane' is designed to mate with the corrugations of a mechanical filter placed immediately upstream in the air flow path. Alternate wires of the layer are maintained electrically at opposite polarities to strengthen the fields and the corrugations permit closer movement of particles to the wires without unacceptable constriction of the air flow. A multilayered filter produces attractive field configurations, like those achieved by corrugated single plane filters herein, in the absence of a corrugated geometry.


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