The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 1988
Filed:
Jul. 30, 1986
Applicant:
Inventors:
Takeshi Okawada, Ibaraki, JP;
Shinjiro Ueda, Abiko, JP;
Susumu Yamazaki, Tsuchiura, JP;
Masahiro Mase, Tochigi, JP;
Nobukatsu Arai, Ushiku, JP;
Kazuaki Nakamori, Ibaraki, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D / ;
U.S. Cl.
CPC ...
415 / ; 415 76 ;
Abstract
According to the turbo molecular pump of the present invention, a regenerative pump is constructed by arcuate eddy current grooves having a predetermined angle with respect to the surface of the outer periphery of a rotor and which are circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferential direction in a stator, and a partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.