The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 1988
Filed:
Jul. 16, 1986
P A Smith, San Pablo, CA (US);
The BOC Group, Inc., Montvale, NJ (US);
Abstract
An electron-beam heated vapor source for operation in vacuum is disclosed. The source comprises a magnet and a pair of parallel pole plates for deflecting the beam from an electron-beam gun through an angle of approximately 270.degree. into a crucible containing material to be vaporized by evaporation, sublimation or other process. A pole rod extends from each of the pole plates into the space between them. A means is provided for precisely adjusting the distance separating the pole rods while the vapor source is in vacuum. This adjustment enables the impact area of the beam, and thus, the deposition rate or other impact area related parameter to be optimized while the vapor source is in operation. Preferably, each pole rod extends through a clearance hole in the pole plate and the adjustment means comprises a rack integral with the rod and a pinion which can be driven by a control means located outside the vacuum chamber.