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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 4728594 B1

PDFFull Text
Date of Patent:
Mar. 01, 1988

Filed:

Jan. 14, 1986

Photosensitive composition with azide or bisazide compound with

Applicant:
Inventors:

Saburo Nonogaki, Tokyo, JP;

Ryotaro Irie, Tokyo, JP;

Michiaki Hashimoto, Sayama, JP;

Takao Iwayanagi, Tokyo, JP;

Assignee:

Hitachi Chemical Co., Ltd., , JP;

Attorney:

Antonelli, Terry & Wands

Primary Examiner:

Charles L Bowers, Jr

Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430197 ; 260349 ; 430194 ; 430325 ; 430927 ;
Abstract

A photosensitive composition comprising an azide compound represented by the formula: ##STR1## wherein each of X and Y is an aromatic substituent group, at least one of X and Y being an aromatic substituent group having an azide group, and n and m are zeros or integers of 1, and a polymeric compound. Since this composition has high resolution and is photosensitive to light having a wavelength of 436 nm, it permits employment of a reduction projection printer and is suitable for fabrication of semiconductor devices.

Find Patent Forward Citations

Nonogaki, Saburo. (1988). Photosensitive composition with azide or bisazide compound with (U.S. Patent No. 4728594). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4728594

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