The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 1988
Filed:
May. 16, 1986
Applicant:
Inventor:
William R Mello, Huntington Beach, CA (US);
Assignee:
Thermco Systems, Inc., Orange, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414592 ; 118500 ; 206334 ; 211 41 ; 432258 ; 432259 ;
Abstract
A wafer boat transfer tool has an upper fork and a lower fork which may be differently configured for supporting wafer boats in different ways. The same tool may be used to transfer boats in one or more steps from locations where they are supported in one way to other locations where they are supported in the same or a different way. Also, the tool may be used to transfer more than one boat at a time without excessive travel in a direction parallel to the boat loader axis. A versatile wafer designed for use with two different forks of the tool may be utilized with different boat loaders and a common wafer transfer machine and in-process storage nests.