The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 1988
Filed:
Aug. 12, 1985
Applicant:
Inventors:
Sarita Thakoor, Pasadena, CA (US);
James L Lamb, Los Angeles, CA (US);
Anilkumar P Thakoor, Pasadena, CA (US);
Satish K Khanna, Pasadena, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419224 ; 20419215 ;
Abstract
Thin films of niobium nitride with high superconducting temperature (T.sub.c) of 15.7.degree. K. are deposited on substrates held at room temperature (.about.90.degree. C.) by heat sink throughout the sputtering process. Films deposited at P.sub.Ar >12.9.+-.0.2 mTorr exhibit higher T.sub.c with increasing P.sub.N2,I, with the highest T.sub.c achieved at P.sub.N2,I =3.7.+-.0.2 mTorr and total sputtering pressure P.sub.tot =16.6.+-.0.4. Further increase of N.sub.2 injection starts decreasing T.sub.c.