The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 1988

Filed:

Apr. 17, 1986
Applicant:
Inventors:

Masakatsu Sakamoto, Tokyo, JP;

Shuhei Ohta, Tokyo, JP;

Shiro Iwakura, Tokyo, JP;

Kaoru Yamazaki, Tokyo, JP;

Yoichi Yaguchi, Tokyo, JP;

Hiroaki Toshima, Tokyo, JP;

Tsugio Sato, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419231 ; 20419211 ; 20419215 ; 427 38 ; 427 39 ; 427 41 ; 428408 ;
Abstract

A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atmosphere of catalystic gas, for instance, H.sub.2 +Ar or H.sub.2 of about 10.sup.-4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond and crystalline carbon particles of hybridized orbital SP.sup.3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond.


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