The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1988
Filed:
Mar. 13, 1987
Applicant:
Inventor:
Josef Berger, Los Altos, CA (US);
Assignee:
VLSI Standards, Inc., Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
55270 ; 7386322 ;
Abstract
An apparatus for collecting particulate matter from a test atmosphere including a chamber having internal walls and posts which support an unpatterned ultra-clear wafer. A gas inlet tube penetrates the chamber with a central gas passageway for directing a stream of high velocity gas onto the wafer. Particles from the stream of gas are collected across most of the surface of the wafer by impaction and by deposition due to enhanced diffusion provided by a vacuum environment.