The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1988
Filed:
Apr. 03, 1986
Applicant:
Inventor:
Kohei Shirota, Akikawa, JP;
Assignee:
Akashi Seisakusho Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; H01J / ;
U.S. Cl.
CPC ...
250307 ; 250311 ; 2503 / ;
Abstract
A method and apparatus for automatically focussing a specimen image in an electron microscope. Excitation currents for an objective lens of the microscope are previously determined in accordance with predetermined magnifications in one-to-one correspondence. When one of the magnifications is selected, the objective lens is automatically excited with the current corresponding to the magnification, whereby the specimen image is automatically properly focussed.