The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1988
Filed:
Dec. 29, 1986
Applicant:
Inventors:
Christian A Seelbach, Scottsdale, AZ (US);
William M Ingle, deceased, late of Phoenix, AZ (US);
Assignee:
Motorola Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F26B / ; F26B / ;
U.S. Cl.
CPC ...
34-9 ; 34 15 ; 34 36 ; 34 92 ;
Abstract
The process utilizes a volatile organo halosilane, such as trimethylchlorosilane, injected through a mass flow controller into a deposition, or like, reactor to dry the mass flow controller, transfer lines and injectors, the deposition surfaces and reactor walls, the exhaust manifold, and vacuum pump and oil.