The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1988
Filed:
Dec. 16, 1986
Applicant:
Inventors:
Michael J Shawver, Hayward, CA (US);
Robert T Lobianco, Sunnyvale, CA (US);
Assignee:
LAM Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
251 62 ; 251158 ; 251193 ;
Abstract
A gate valve assembly includes a housing, a shaft axially mounted within the housing, and a gate member secured to one end of the shaft. A mechanism within the housing is provided for axially extending and rotating the shaft in order to move the gate member into sealing engagement with a port in a processing chamber. By providing an expandable seal about the shaft and secured to the housing, the mechanical drive portion of the valve may be isolated from the interior of the chamber. The valve is particularly suitable for use with loadlocks and other chambers having a low pressure environment.