The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 1988
Filed:
Jan. 12, 1987
Applicant:
Inventor:
Yukinori Andou, Tenri, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J / ; B25J / ;
U.S. Cl.
CPC ...
294 641 ; 294907 ; 901 40 ; 901 46 ;
Abstract
A robot for transporting a semiconductor wafer comprises a robot hand for engaging and retaining a semiconductor wafer, and at least one position sensor for detecting whether the semiconductor wafer is present at a predetermined position on the robot hand. The robot hand includes a first support plate for supporting the retained semiconductor wafer and a second support plate provided with the at least position sensor for supporting the first support plate.