The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 1988

Filed:

Jan. 22, 1985
Applicant:
Inventor:

Robert C Pandorf, Newton Highlands, MA (US);

Assignee:

Helix Technology Corporation, Waltham, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K / ; B08B / ; B01D / ;
U.S. Cl.
CPC ...
137244 ; 15246 ; 62 555 ; 62268 ; 92 78 ; 92200 ; 13751627 ; 137536 ; 137540 ; 417901 ;
Abstract

The pressure relief valve is debris resistant, self-cleaning, and self-actuating in a cryopump. It includes an o-ring carried by a valve member within a valve cylinder. In opening, the valve member moves away from an end port to open vent ports in the side of the valve cylinder while withdrawing the o-ring to a debris free and protected region of the valve. As the valve member is moved into the closed position in response to an atmospherical pressure differential, a wiper ring cleans debris from the inner surface of the valve cylinder. A taper is provided on the inner surface of the cylinder to release compression on the vacuum sealing o-ring upon opening and to compress the o-ring as the valve member moves to the closed position. The wiper ring is expansible in order to provide a wiping action along the entire taper and prevent debris from reaching the o-ring. The end of the valve cylinder opposite to the end port serves as a shock absorber as the valve is opened. An outer connecting flange is provided for connection of an exhaust housing.


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