The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1988
Filed:
Jul. 31, 1986
Applicant:
Inventors:
Hisao Haku, Neyagawa, JP;
Yukio Nakashima, Hirakata, JP;
Kaneo Watanabe, Yawata, JP;
Tsugufumi Matsuoka, Neyagawa, JP;
Assignee:
Sanyo Electric Co., Ltd., Moriguichi, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
437101 ; 427 86 ; 427 75 ; 427 74 ; 427 87 ; 427 85 ; 427 88 ; 427 89 ; 427 91 ; 427 93 ; 427 531 ; 437173 ; 437235 ;
Abstract
A method for fabricating a periodically multilayered film having a plurality of amorphous thin layers of different kinds stacked periodically is performed by forming at least one kind of the layers in the stack by a photo CVD method, whereby a more definite periodicity in the composition of the lattice and fewer defects are achieved.