The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1988
Filed:
Dec. 11, 1986
Eiichi Irie, Washimiya, JP;
Efuesukei Kabushiki Kaisha, Tokyo, JP;
Abstract
The apparatus includes a treating container having a light transmission window and a closure member for opening and closing the container, a light source positioned opposite the light transmission window, and equipment for deoxygenating at least a substantial portion of the oxygen from the interior of the container. The container is charged with a semiconductor wafer adhered to a substantially light transparent substrate by a photo-setting adhesive agent. The agent is cured or hardened by irradiation by the light source thereby decreasing its adhesive force. A first cassette casing, a charging conveyor for removing untreated workpieces from the first cassette casing, a charging conveyor for removing untreated workpieces from the charging conveyor into the container can be provided at one side of the container. A discharging arm for removing the treated workpiece from the container, second cassette casing, and a discharging conveyor for transferring treated workpieces from the discharging arm to the second cassette casing can be provided on the other side of the container.