The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1988
Filed:
Apr. 28, 1987
Applicant:
Inventors:
Philip A Lessard, Acton, MA (US);
Bruce R Andeen, Acton, MA (US);
Assignee:
Helix Technology Corporation, Waltham, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 55269 ; 62268 ; 417901 ;
Abstract
A cryopump with quicker adsorption of non-condensible gases is disclosed. The second stage cryopanel of this cryopump is comprised of an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the second stage heat sink. Each disc of the array is bent toward the frontal cryopanel at the outer edge of the disc and is flat radially inward from the bend. Each disc is coated with adsorbent material on the surface away from the frontal cryopanel radially inward from the bend in the disc.