The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1988
Filed:
Jan. 07, 1987
Applicant:
Inventors:
Bruce R Andeen, Acton, MA (US);
Robert C Pandorf, Newton Highlands, MA (US);
Assignee:
Helix Technology Corporation, Waltham, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 55269 ; 62100 ; 62116 ; 62268 ; 62500 ; 417901 ;
Abstract
A cryopump is regenerated by means of an ejector pump which draws gas from the cryopump as the pump is warmed. The ejector is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation.