The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1988
Filed:
Aug. 23, 1982
Daniel A Worsham, San Jose, CA (US);
Pacific Western Systems, Inc., Mountain View, CA (US);
Abstract
In an apparatus for rounding the edges of semiconductive wafers, the wafers are loaded onto two parallel counter rotating screws one having a right hand thread and the other having a left hand thread. The grooves of respective ones of said screw engage the edges of the semiconductive wafer to be rounded. The grooves of the respective screws are of rounded cross-section and an abrasive slurry is introduced into the grooves to facilitate abrading of the edges of the wafers. A pressure roller engages the edges of the wafers and forces the wafers into the grooves to further facilitate rounding of the edges. Due to the action of the screws, the wafers, as they are being rounded are caused to traverse the length of the screws to provide a continuous processing of the wafers.