The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 1987
Filed:
Jul. 25, 1985
Applicant:
Inventor:
Peter S Gwozdz, Cupertino, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23P / ; B44C / ; B05D / ;
U.S. Cl.
CPC ...
437228 ; 156651 ; 437233 ;
Abstract
A process is disclosed for filling a trench in an integrated circuit structure without forming a void in the trench which, in a preferred embodiment, comprises partially filling the trench with an etchable material, etching the material in the trench with an etchant capable of removing material adjacent the top of the trench at a rate faster than the rate of removal adjacent the bottom of the trench, and then filling the remainder of the trench with the material; whereby the material deposited adjacent the top of the trench will not close off the trench prior to complete filling of the bottom of the trench with the material.