The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 1987

Filed:

Jun. 24, 1985
Applicant:
Inventors:

Naomasa Sunano, Akashi, JP;

Naotatsu Asahi, Katsuta, JP;

Toshio Yoshida, Kasukabe, JP;

Assignees:

Shinyei Kaisha, Hyogo, JP;

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
338 34 ; 427 34 ; 2959 / ; 2961 / ;
Abstract

A gas sensor includes a pair of electrodes printed on an electrically insulating substrate, a sensitive layer deposited on tip portions of the electrodes and a part of the substrate adjacent to the tip portions and bridging the space between the electrodes at the tip portion, and a protective film deposited on the electrodes and a part of the substrate adjacent to the tip portion so that a part of each electrode covered with the sensitive layer is free of the protective film. The sensitive layer is formed by depositing titanium oxide by plasma spraying on the substrate, and then heat-treating the deposited titanium oxide, so as to provide a diffusion reactive layer between the sensitive layer and the substrate and to form fine grooves on the surface of the sensitive layer.


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