The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 1987
Filed:
Aug. 20, 1985
Applicant:
Inventor:
John R McNeil, Albuquerque, NM (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250571 ; 356445 ;
Abstract
An improved optical scatterometer includes a multiple detector array that enables the measurement of sample microstructure over an increased range of spatial frequency. One array of optical detectors is positioned in a plane perpendicular to the plane containing an incident laser beam and a specularly reflected beam to detect indications of back-scattered and forward-scattered light in that perpendicular plane. Two laser beams having different wavelengths may be employed to determine the optical characteristics of a film and an underlying substrate.