The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 1987
Filed:
Nov. 17, 1986
Applicant:
Inventors:
Eckehard Waschler, Neuhausen, DE;
Hermann Clauss, Leingarten, DE;
Heinz-Achim Hefner, Brackenheim, DE;
Assignee:
Telefunken Electronic GmbH, Heilbronn, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C03C / ;
U.S. Cl.
CPC ...
437228 ; 156646 ; 156653 ; 156643 ;
Abstract
In a process for manufacturing a semiconductor arrangement, wherein an uneven surface of the semiconductor arrangement is smoothened, there is produced on the uneven surface an insulating layer of such thickness that the insulating layer produced on the surface exhibits an even surface. The insulating layer is then partially removed again.